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RIF-Interferometer
Development of a flexible and compact measurement system, which combines complementary interferometric methods (Reference number: Q06002)
The developed system (Fig. 1) offers the potential to perform measurements in accordance with Phase Shifting Interferometry (PSI), Electronic Speckle Pattern Interferometry (ESPI) and Digital Holography (DHI). Two different light sources can be used and the laser light may be provided by an optical fibre or via free space. In addition, the system offers the possibility to adjust the optical illumination geometry according to the size of the object under investigation. The measurement resolution is about 5 nm for polished surfaces and about 30 nm for diffuse objects.
Fig. 1: Interferometric measurement system
Funded by
Industry
Timeframe
2007/11/01 - 2008/08/31
Department Manager
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