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Laserjet
Modified electrochemical laser-jet process for the 3D micro structuring of metals and alloys (Vo 530/14-3)
In this research project, a electrochemical laser-jet process for the micro structuring of metals was developed. With the help of a reactive liquid jet in combination with a laser beam a massive increase in the chemical removal rates by 10-fold to 10-2 mm3/min at high processing quality was achieved. The aspect ratio for single scanning was 6 times increased to over 3:1 and the minimum structure size reduced to 3 µm. Besides the intrinsic kinetics, i.e. the temperature-dependent chemical reaction itself, the removal behaviour ot the laser-jet process is also significantly determined by diffusion processes. The chemically reactive jet beam, through which the laser beam is coupled into the processing zone, helps to ensure an efficient exchange and transport of the reaction participants, while local cooling. Process limitations are, for example, for the nickel-titanium material a contour accuracy of 1-2 µm and a roughness of 0.2 µm. The further development of the laser-jet process to an industrial processes with integrated control and measurement technology for the direct 3D micro structuring of metallic materials in one clamping takes place within the framework of the Sonderforschungsbereich 747 "Mikrokaltumformen".
Funded by
DFG
Timeframe
2006/05/01 - 2008/12/31
Department Manager
Dipl.-Phys. Haiko von Rebenstock
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